Title: Laser thermal anneal of polysilicon channel to boost 3D memory performance
Authors: Lisoni, Judit
Arreghini, Antonio
Congedo, Gabriele
Toledano Luque, Maria
Toqué-Tresonne, Inés
Huet, Karim
Capogreco, Elena
Liu, Lifang
Tan, Chi Lim
Degraeve, Robin
Van den Bosch, Geert
Van Houdt, Jan
Issue Date: 2014
Host Document: Symposium on VLSI Technology pages:24-25
Conference: Symposium on VLSI Technology location:Honolulu, HI US date:2014-04-09
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science