Title: ALD applications in advanced CMOS scaling
Authors: Heyns, Marc
Issue Date: 2014
Host Document: Baltic ALD Conference, pages:na
Conference: Baltic ALD Conference, location:Helsinki Finland date:2014-05-12
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Surface and Interface Engineered Materials
Supporting Services Campusmanagement Science, Engineering and Technology

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