ITEM METADATA RECORD
Title: Impact of Plasma Pretreatment and Pore Size on the Sealing of Ultra-Low-k Dielectrics by Self-Assembled Monolayers
Authors: Sun, Yiting ×
Krishtab, Mikhail
Struyf, Herbert
Verdonck, Patrick
De Feyter, Steven
Baklanov, Mikhail R
Armini, Silvia #
Issue Date: 2014
Publisher: American Chemical Society
Series Title: Langmuir vol:30 issue:13 pages:3832-3844
ISSN: 0743-7463
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Imaging and Photonics
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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