Title: Plasma enhanced atomic layer deposition of Ga2O3 thin films
Authors: Ramachandran, Ranjith K ×
Dendooven, Jolien
Botterman, Jonas
Pulinthanathu Sree, Sreeprasanth
Poelman, Dirk
Martens, Johan
Poelman, Hilde
Detavernier, Christophe #
Issue Date: 2014
Publisher: R S C Publications
Series Title: Journal of Materials Chemistry A vol:2 issue:45 pages:19232-19238
ISSN: 2050-7488
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Centre for Surface Chemistry and Catalysis
× corresponding author
# (joint) last author

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