Title: A systematical method to determine the internal pressure and hermeticity of MEMS packages
Authors: Wang, Bo ×
de Coster, Jeroen
Simone, Severi
Wevers, Martine
De Wolf, Ingrid #
Issue Date: 2014
Publisher: Institute of Electrical and Electronics Engineers
Series Title: Journal of Microelectromechanical Systems vol:23 issue:4 pages:862-870
ISSN: 1057-7157
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Structural Composites and Alloys, Integrity and Nondestructive Testing
× corresponding author
# (joint) last author

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