Title: Leakage Control in 0.4-nm EOT Ru/SrTiOx/Ru Metal-Insulator-Metal Capacitors: Process Implications
Authors: Swerts, Johan ×
Popovici, Mihaela
Kaczer, Ben
Aoulaiche, Marc
Redolfi, Augusto
Clima, Sergiu
Caillat, Christian
Wang, Wan Chih
Afanas'ev, Valeri
Jourdan, Nicolas
Olk, Christina
Hody, Hubert
Van Elshocht, Sven
Jurczak, Malgorzata #
Issue Date: 2014
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Electron Device Letters vol:35 issue:7 pages:753-755
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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