Title: Generation of Si dangling bond defects at Si/insulator interfaces induced by oxygen scavenging
Authors: Cerbu, Florin ×
Nguyen, A. P. D
Kepa, Jacek
Afanas'ev, Valeri
Stesmans, Andre #
Issue Date: 2014
Publisher: Akademie-Verlag
Series Title: Physica Status Solidi B, Basic Research vol:251 issue:11 pages:2193-2196
ISSN: 0370-1972
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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