Title: Reproducibility of an Abbe-compliant measurement system using linear encoders
Authors: Bosmans, Niels
Qian, Jun
Reynaerts, Dominiek
Issue Date: 8-Jul-2014
Host Document: Proceedings of the 4th International Conference on Nanomanufacturing
Conference: nanoMan2014 edition:4 location:Bremen date:8-10 July 2014
Article number: F2-1
Abstract: By fully exploiting precision engineering design principles such as measurement according to the Abbeprinciple and functional separation of the structural frames and the metrology loops, the positioning accuracy of
linear stages in ultra-precision machines can be drastically increased. KU Leuven has proposed a new concept
for measuring with linear encoders in a configuration that allows Abbe -offset-free measurement and separation
of the metrology loop from the structural frame. Detailed error budgeting has shown that this measurement
system could be able to measure the position of a stage with a measurement uncertainty of 20 nm (k=2) in one
direction of movement for changes of the temperature of the environment of 1 °C. A 1-DOF prototype of this
concept has been developed and a dedicated setup has been designed and built to verify the reproducibility of
the 1-DOF system for changing temperature. Experiments have shown that the envisioned stability requirements
are met.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section

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