Title: Improved Plasma Resistance for Porous Low-k Dielectrics by Pore Stuffing Approach
Authors: Zhang, Liping ×
de marneffe, Jean-Francois
Heyne, Markus
Sun, Yiting
De Gendt, Stefan
baklanov, Mikhail #
Issue Date: Jan-2015
Publisher: Electrochemical Society, Inc.
Series Title: ECS Journal of Solid State Science and Technology vol:4 issue:1 pages:N3098-N3107
ISSN: 2162-8769
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
Molecular Imaging and Photonics
× corresponding author
# (joint) last author

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