Title: Leaching and drying marks on photoresist-coated substrates
Authors: Belmiloud, N ×
Tamaddon, Amir-Hossein
Mertens, P. W
Struyf, H #
Issue Date: 2014
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:114 pages:131-135
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

Files in This Item:
File Description Status SizeFormat
pub07297.pdfMain article Published 1127KbAdobe PDFView/Open Request a copy

These files are only available to some KU Leuven Association staff members


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science