ITEM METADATA RECORD
Title: Line edge and width roughness smoothing by plasma treatment
Authors: De Schepper, Peter ×
Hansen, Terje
Altamirano-Sanchez, Efrain
Vaglio Pret, Alessandro
El Otell, Ziad
Boulart, Werner
De Gendt, Stefan #
Issue Date: 2014
Publisher: SPIE - International Society for Optical Engineering
Series Title: JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS vol:13 issue:2
Journal of Micro-Nanolithography, MEMS, and MOEMS vol:13 issue:2
Article number: 23006
ISSN: 1932-5150
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
Supporting Services Campusmanagement Science, Engineering and Technology
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science