Title: Chemical vapor deposition processes for the fabrication of epitaxial Si-O superlattices
Authors: Jayachandran, Suseendran ×
Delabie, Annelies
Maggen, Jens
Caymax, Matty
Loo, Roger
Meersschaut, Johan
Lenka, Haraprasanna
Vandervorst, Wilfried
Heyns, Marc #
Issue Date: 2014
Publisher: Elsevier Sequoia
Series Title: Thin Solid Films vol:557 pages:36-41
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Surface and Interface Engineered Materials
Department of Materials Engineering - miscellaneous
Quantum Chemistry and Physical Chemistry Section
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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