Title: Hydrogen outgassing induced liner/barrier reliability degradation in through silicon via's
Authors: Li, Yunlong ×
Oba, Yoshiyuki
Wu, Chen
Van Huylenbroeck, Stefaan
Van Besien, Els
Vereecke, Guy
Stucchi, Michele
De Wolf, Ingrid
Beyer, Gerald
Beyne, Eric
Croes, Kristof #
Issue Date: 2014
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:104 issue:14 pages:1-3
Article number: 142906
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Structural Composites and Alloys, Integrity and Nondestructive Testing
Department of Materials Engineering - miscellaneous
Supporting Services Campusmanagement Science, Engineering and Technology
× corresponding author
# (joint) last author

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