ITEM METADATA RECORD
Title: Metal gate work function tuning by Al incorporation in TiN
Authors: Lima, L. P. B ×
Dekkers, H. F. W
Lisoni, J. G
Diniz, J. A
Van Elshocht, S
De Gendt, Stefan #
Issue Date: 2014
Publisher: AMER INST PHYSICS
Series Title: JOURNAL OF APPLIED PHYSICS vol:115 issue:7 pages:1-1
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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