Title: Reproducibility of a Nanometre Accurate Moving-Scale Measurement System
Authors: Bosmans, Niels ×
Qian, Jun
Reynaerts, Dominiek #
Issue Date: May-2014
Publisher: Trans Tech Publications
Series Title: Key Engineering Materials vol:613 pages:37-42
Abstract: A dedicated experimental setup has been designed and built up for determining the reproducibility of a 1-DOF moving-scale measurement system. A 3-DOF moving-scale system would enable the measurement of the position of a workpiece table moving in three perpendicular directions with minimized Abbe-offset. This allows normal machine tools and CMMs to match or even surpass the accuracy of ultra-precision machines. An uncertainty budget indicates that the 1-DOF moving-scale system can obtain a measurement uncertainty of 18 nm. Thermal drift is the largest contribution to the measurement uncertainty and should be accurately determined.
ISSN: 1013-9826
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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