Title: Design guidelines for releasing silicon nanowire arrays by liquid and vapor phase hydrofluoric acid
Authors: Passi, Vikram ×
Dubois, Emmanuel
Lecestre, Aurelie
Sanchez Linde, Alicia
Du Bois, Bert
Raskin, Jean-Pierre #
Issue Date: 18-Sep-2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:103 pages:57-65
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Laboratory of Ion Channel Research
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science