Functional Polymers for Microsystems: Micromachining and Applications
Functionele polymeren voor microsystemen: microbewerkingen en toepassingen
Guan, Tiannan; S0197016
This work aims at exploring deeper insights of functional polymer materials for MEMS applications.In the first part of the dissertation, photopatternable epoxies under the brand name of EpoClad and EpoCore are investigated due to their promising optical properties for sensor applications. A fabrication process is developed to fabricate an EpoClad/EpoCore optical platform, which contains a built-in fiber clamp system, optical waveguides, as well as the movable mechanical parts. The spectral and transmissive properties of the polymer waveguides are studied. Both mechanical and thermal modulations of optical transmissions in the waveguides are investigated. An optical accelerometer is also fabricated using the proposed EpoClad/EpoCore optical platform.In the second part of the book, a chemically modified environmental sensitive Pluronic hydrogel is synthesized. A MEMS compatible fabrication process is developed, enabling the patterning of the hydrogel at micro scale. This customized Pluronic hydrogel holds promising potential for use in biomedical applications due to its outstanding biocompatibility. A MEMS platform for hydrogel benchmarking is also designed, fabricated and tested. This hydrogel testbed allows the application of chemical and thermal stimuli to the hydrogel under test, monitoring the hydrogel's environmental sensitivity and behavior on a micro scale.In a final chapter, the EpoClad/EpoCore optical platform and the hydrogel material are integrated into an on-chip tunable hydrogel microlens system.