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Title: Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
Authors: Deng, Shaoren ×
Verbruggen, Sammy
Lenaerts, Silvia
Martens, Johan
Van den Berghe, Sven
Devloo-Casier, Kilian
Devulder, Wouter
Dendooven, Jolien
Deduytsche, Davy
Detavernier, Christophe #
Issue Date: 2014
Publisher: Published by AVS through the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:32 pages:01A123/1 -01A123/7
ISSN: 0734-2101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Centre for Surface Chemistry and Catalysis
× corresponding author
# (joint) last author

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