Title: Nanoscale Etching of In0.53Ga0.47As in H2O2/HCl Solutions for Advanced CMOS Processing
Authors: van Dorp, Dennis H. ×
Arnauts, Sophia
Cuypers, Daniel
Rip, Jens
Holsteyns, Frank
De Gendt, Stefan
Kelly, John J. #
Issue Date: 15-Apr-2014
Publisher: Electrochemical Society, Inc.
Series Title: ECS Journal of Solid State Science and Technology vol:3 issue:6 pages:179-184
ISSN: 2162-8769
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
Supporting Services Campusmanagement Science, Engineering and Technology
× corresponding author
# (joint) last author

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