ITEM METADATA RECORD
Title: Interface chemistry of Al2O3/III-V upon atomic layer deposition
Authors: Tallarida, Massimo
Adelmann, Christoph
Cuypers, Daniel
Rodriguez, Leonard
Lin, Dennis
Michling, Marcel
Friedrich, Daniel
De Clercq, Astrid
Delabie, Annelies
Van Elshocht, Sven
Locquet, Jean-Pierre
Caymax, Matty
Schmeisser, Dieter #
Issue Date: 14-May-2012
Conference: E-MRS Spring Meeting location:Strasbourg date:14 May 2012
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Non-KU Leuven Association publications
# (joint) last author

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