Title: Study of the etching mechanism of heavily n-type doped Si in HF solutions
Authors: Cuypers, Daniel
Valckx, Nick
De Gendt, Stefan
Issue Date: 1-Mar-2010
Conference: Chemistry Conference for Young Scientists edition:10 location:Blankenberge, Belgium date:1-2 March 2010
Publication status: published
KU Leuven publication type: AMa
Appears in Collections:Molecular Design and Synthesis

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