ITEM METADATA RECORD
Title: Immersion lithography: dynamics of the contact line
Authors: Doyen, G.
Seveno, David
De Coninck, J.
Issue Date: 11-Sep-2013
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Structural Composites and Alloys, Integrity and Nondestructive Testing

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