Title: A high-throughput silicon microphysiometer
Authors: Verhaegen, K. ×
Baert, Kris
Simaels, J.
Van Driessche, Willy #
Issue Date: 2000
Publisher: Elsevier Sequoia
Series Title: Sensors and Actuators vol:82 pages:186-190
ISSN: 0250-6874
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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