Title: In-situ grown or solid phase recrystallized P-doped mono- and polysilicon by rf-plasma-CVD
Authors: Baert, Kris ×
Deschepper, P.
Pattyn, Hugo
Rodriguez, A.
Nijs, J.
Mertens, Robert Pierre #
Issue Date: 1990
Publisher: Elsevier Sequoia
Series Title: Thin Solid Films vol:184 issue:184 pages:139-146
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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