Title: Very low temperature epitaxial Si by PECVD
Authors: Baert, Kris ×
Yamada, A.
Konagai, M.
Takahashi, K. #
Issue Date: 5-Jun-1989
Publisher: Société française du vide
Series Title: Le Vide, Les Couches Minces vol:132 issue:246 pages:132-132
ISSN: 0223-4335
Publication status: published
KU Leuven publication type: DI
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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