Title: Heteroepitaxy of InP on Si(001) by selective-area metal organic vapor-phase epitaxy in sub-50 nm width trenches: The role of the nucleation layer and the recess engineering
Authors: Merckling, Clement ×
Waldron, Niamh
Jiang, Sijia
Guo, W
Collaert, N
Caymax, Matty
Vancoille, Eric
Barla, Kathy
Thean, Aaron
Heyns, Marc
Vandervorst, Wilfried #
Issue Date: Jan-2014
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:115 issue:2 pages:023710-1-023710-6
Article number: doi: 10.1063/1.4862044
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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