Title: Heteroepitaxy of InP on Si(001) by selective-area metal organic vapor-phase epitaxy in sub-50 nm width trenches: The role of the nucleation layer and the recess engineering
Authors: Merckling, Clement ×
Waldron, Niamh
Jiang, Sijia
Guo, W
Collaert, N
Caymax, Matty
Vancoille, Eric
Barla, Kathy
Thean, Aaron
Heyns, Marc
Vandervorst, Wilfried #
Issue Date: Jan-2014
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:115 issue:2 pages:023710-1-023710-6
Article number: doi: 10.1063/1.4862044
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Surface and Interface Engineered Materials
Supporting Services Campusmanagement Science, Engineering and Technology
× corresponding author
# (joint) last author

Files in This Item:
File Description Status SizeFormat
pub07065.pdfMain article Published 1978KbAdobe PDFView/Open Request a copy

These files are only available to some KU Leuven Association staff members


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science