Title: Growth and integration challenges for carbon nanotube interconnects
Authors: Vanpaemel, Johannes ×
Sugiura, Masahito
Barbarin, Yohan
De Gendt, Stefan
Tökei, Zsolt
Vereecken, Philippe
van der Veen, Marleen #
Issue Date: 2014
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:120 pages:188-193
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Centre for Surface Chemistry and Catalysis
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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