Title: Transformation of nanoscale metal oxide films into MOF films for application as low-k dielectrics in microelectronics
Authors: Stassen, Ivo
Krishtab, Mikhail
Baklanov, Mikhail
Vereecken, Philippe
De Vos, Dirk
Ameloot, Rob
Issue Date: 28-Feb-2014
Conference: ChemCYS 2014 Chemistry Conference for Young Scientists location:Blankenberge date:27-28 Feb 2014
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Centre for Surface Chemistry and Catalysis
Molecular Design and Synthesis

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