ITEM METADATA RECORD
Title: Cleaning Challenges and Solutions for Advanced Technology Nodes
Authors: Mertens, P. W
Vos, R
Masayuki, W
Arnauts, S
Takahashi, H
Tsvetanova, Diana
Cuypers, Daniel
Sioncke, S
Valckx, Bert
Brems, S
Hauptmann, Marc
Heyns, Marc #
Issue Date: 2011
Publisher: Electrochemical Society, Inc
Host Document: Electrochemical Society Transactions - ECS Transactions vol:41 issue:5 pages:3-13
Conference: 12th International Symposium on Semiconductor Cleaning Science and Technology (SCST) during the Fall Meeting of the Electrochemical-Society (ECS) location:Boston: MA date:OCT 10-11, 2011
ISBN: 978-1-60768-259-2
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
# (joint) last author

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