ITEM METADATA RECORD
Title: Etching of III-V Materials Determined by ICP-MS with Sub-Nanometer Precision
Authors: Rip, Jens
Cuypers, Daniel ×
Arnauts, Sophia
Holsteyns, Frank
van Dorp, Dennis
De Gendt, Stefan #
Issue Date: 31-Dec-2013
Publisher: Electrochemical Society, Inc.
Series Title: ECS Journal of Solid State Science and Technology vol:3 issue:1 pages:N3064-N3068
ISSN: 2162-8769
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
Supporting Services Campusmanagement Science, Engineering and Technology
× corresponding author
# (joint) last author

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