Title: UV-induced modification of fluorocarbon for improvement of subsequent wet removal
Authors: Le, Quoc Toan
Simms, Ihsan
Yue, Henry
Brown, Ian
Kesters, Els
Vereecke, Guy
Struyf, Herbert
De Gendt, Stefan #
Issue Date: 2014
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:114 pages:136-140
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
Supporting Services Campusmanagement Science, Engineering and Technology
# (joint) last author

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