Title: Atomic Layer Deposition of Ruthenium on a Titanium Nitride Surface: A Density Functional Theory Study
Authors: Phung, Quan
Vancoillie, Steven
Pourtois, Geoffrey
Swerts, Johan
Pierloot, Kristine
Delabie, Annelies # ×
Issue Date: 2013
Publisher: American Chemical Society
Series Title: Journal of Physical Chemistry C vol:117 pages:19442-19453
ISSN: 1932-7447
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
× corresponding author
# (joint) last author

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