Title: Multi-objective and robust optimal control of a CVD reactor for polysilicon production
Authors: Vallerio, Mattia
Claessens, Daan
Logist, Filip
Van Impe, Jan
Issue Date: 2014
Publisher: Hungarian Chemical Society
Host Document: Proceedings of the 24th European Symposium of Computer Aided Process Engineering pages:571-576
Conference: European Symposium on Computer Aided Process Engineering (ESCAPE) edition:24 location:Budapest, Hungary date:15-18 June 2014
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Bio- & Chemical Systems Technology, Reactor Engineering and Safety Section

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