Title: Sidewall crystalline orientation effect on post-treatments for a replacement metal gate bulk fin field effect transistor
Authors: Lee, Jae Woo
Simoen, Eddy
Veloso, Anabela
Cho, Moon Ju
Boccardi, Guillaume
Ragnarsson, Lars-Ake
Chiarella, Thomas
Horiguchi, Naoto
Groeseneken, Guido
Thean, Aaron
Issue Date: 2013
Publisher: American Chemical Society
Series Title: ACS Applied Materials and Interfaces vol:5 issue:18 pages:8865-8868
ISSN: 1944-8244
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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