Title: 3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography
Authors: Vandervorst, Wilfried
Kambham, Ajay Kumar
Kumar, Arul
Gilbert, Matthieu
Issue Date: 2013
Publisher: North-Holland Pub. Co.
Series Title: Ultramicroscopy vol:132 issue:1 pages:69-69
ISSN: 0304-3991
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section

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