|ITEM METADATA RECORD
|Title: ||Wet chemical etching of InP for cleaning applications: II. Oxide removal|
|Authors: ||van Dorp, Dennis|
De Gendt, Stefan
|Issue Date: ||2013 |
|Publisher: ||Electrochemical Society, Inc.|
|Series Title: ||ECS Journal of Solid State Science and Technology vol:2 issue:4 pages:P190-P194|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Molecular Design and Synthesis|
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