Title: Wet chemical etching of InP for cleaning applications: II. Oxide removal
Authors: van Dorp, Dennis
Cuypers, Daniel
Arnauts, Sophia
Moussa, Alain
Rodriguez, Leonard
De Gendt, Stefan
Issue Date: 2013
Publisher: Electrochemical Society, Inc.
Series Title: ECS Journal of Solid State Science and Technology vol:2 issue:4 pages:P190-P194
ISSN: 2162-8769
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis

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