Title: Low-power DRAM-compatible replacement gate high-k/metal gate stacks
Authors: Ritzenthaler, Romain
Schram, Tom
Bury, Erik
Spessot, Alessio
Caillat, Christian
Srividya, Vidya
Sebaai, Farid
Mitard, Jerome
Ragnarsson, Lars-Ake
Groeseneken, Guido
Horiguchi, Naoto
Fazan, Pierre
Thean, Aaron
Issue Date: 2013
Publisher: Pergamon Press
Series Title: Solid-State Electronics vol:84 pages:22-27
ISSN: 0038-1101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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