ITEM METADATA RECORD
Title: UV-induced modification of fluorocarbon polymer: effect of treatment atmosphere and aging on dissolution in organic solvent
Authors: Le, Quoc Toan
Kesters, Els
Conard, Thierry
Struyf, Herbert
De Gendt, Stefan
Issue Date: 2013
Publisher: Trans Tech Publications
Host Document: Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS pages:132-135
Conference: Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS location:Gent Belgium date:17/09/2012
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis

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