|ITEM METADATA RECORD
|Title: ||Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)|
|Authors: ||Franquet, Alexis|
Vandervorst, Wilfried #
|Issue Date: ||2013 |
|Publisher: ||Institute of Physics Publishing Ltd.|
|Series Title: ||Journal of Physics - Conference Series vol:417 issue:1 pages:12033|
|Conference: ||15th International Conference on Thin Films - ICTF location:Kyoto Japan date:11/08/2011|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Nuclear and Radiation Physics Section|
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