Title: Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)
Authors: Franquet, Alexis
Conard, Thierry
Gilbert, Matthieu
Hantschel, Thomas
Vandervorst, Wilfried #
Issue Date: 2013
Publisher: Institute of Physics Publishing Ltd.
Series Title: Journal of Physics - Conference Series vol:417 issue:1 pages:12033
Conference: 15th International Conference on Thin Films - ICTF location:Kyoto Japan date:11/08/2011
ISSN: 1742-6588
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

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