Title: The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM
Authors: Celano, Umberto ×
Chintala, Ravi Chandra
Adelmann, Christoph
Richard, Olivier
Vandervorst, Wilfried #
Issue Date: 2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:109 pages:318-321
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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