Advances in Resist Materials and Processing Technology XXX, Date: 2013/01/24 - 2013/01/02, Location: San Diego, CA USA
Publication date:
2013-01-01
Volume:
8682
Pages:
868207 -
868207
DOI:
10.1117/12.2011423
Publisher:
Society of Photo-optical Instrumentation Engineers
Advances in Resist Materials and Processing Technology XXX
Author:
Winroth, Gustaf
Rosseel, Erik ; Delvaux, Christie ; Altamirano Sanchez, Efrain ; Ercken, Monique
Keywords:
Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Materials Science, Multidisciplinary, Optics, Engineering, Materials Science, Implantation, photoresist, shrink, curing, pretreatment, 4006 Communications engineering, 4009 Electronics, sensors and digital hardware, 5102 Atomic, molecular and optical physics