Title: Wet chemical etching of InP for cleaning applications: I. An oxide formation/oxide dissolution model
Authors: Cuypers, Daniel
De Gendt, Stefan
Arnauts, Sophia
Paulussen, Kris
van Dorp, Dennis
Issue Date: 2013
Publisher: Electrochemical Society, Inc.
Series Title: ECS Journal of Solid State Science and Technology vol:2 issue:4 pages:P185-P189
ISSN: 2162-8769
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis

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