|ITEM METADATA RECORD
|Title: ||Spectroscopic study of polysilicon traps by means of fast capacitance transients|
|Authors: ||Toledano Luque, Maria|
Van Houdt, Jan
|Issue Date: ||2013 |
|Publisher: ||Published for the Society by the American Institute of Physics|
|Series Title: ||Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:31 issue:1 pages:01A110|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Structural Composites and Alloys, Integrity and Nondestructive Testing|
ESAT - MICAS, Microelectronics and Sensors
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