Title: Spectroscopic study of polysilicon traps by means of fast capacitance transients
Authors: Toledano Luque, Maria
Tang, Baojun
Degraeve, Robin
Kaczer, Ben
Simoen, Eddy
Van Houdt, Jan
Groeseneken, Guido
Issue Date: 2013
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:31 issue:1 pages:01A110
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Structural Composites and Alloys, Integrity and Nondestructive Testing
ESAT - MICAS, Microelectronics and Sensors

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