Title: The impact of pupil plane filtering on mask roughness transfer
Authors: Baylav, Burak ×
Maloney, Chris
Levinson, Zac
Bekaert, Joost
Vaglio Pret, Alessandro
Smith, Bruce W #
Issue Date: 2013
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:31 issue:6
Article number: 06F801
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science