|ITEM METADATA RECORD
|Title: ||Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics|
|Authors: ||Vanstreels, Kris|
|Issue Date: ||2012 |
|Publisher: ||American Institute of Physics|
|Series Title: ||Applied Physics Letters vol:101 issue:12 pages:123109|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Department of Materials Engineering - miscellaneous|
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