Title: Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics
Authors: Vanstreels, Kris
Wu, Chen
Verdonck, Patrick
Baklanov, Mikhaïl
Issue Date: 2012
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:101 issue:12 pages:123109
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous

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