|ITEM METADATA RECORD
|Title: ||On the oxide trap density and profiles of 1-nm EOT metal-gate last CMOS transistors assessed by low-frequency noise|
|Authors: ||Simoen, Eddy|
|Issue Date: ||2013 |
|Publisher: ||Institute of Electrical and Electronics Engineers|
|Series Title: ||IEEE Transactions on Electron Devices vol:60 issue:11 pages:3849-3855|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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