Title: On the oxide trap density and profiles of 1-nm EOT metal-gate last CMOS transistors assessed by low-frequency noise
Authors: Simoen, Eddy
Veloso, Anabela
Higuchi, Yuichi
Horiguchi, Naoto
Claeys, Cor
Issue Date: 2013
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Electron Devices vol:60 issue:11 pages:3849-3855
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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