Title: Correlation between field dependent electrical conduction and dielectric breakdown in a SiCOH based low-k (k=2.0) dielectric
Authors: Wu, Chen ×
Li, Y
Barbarin, Y
Ciofi, I
Croes, K
Bommels, J
De Wolf, Ingrid
Tokei, Zs #
Issue Date: 2013
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:103 issue:3
Article number: 32904
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Structural Composites and Alloys, Integrity and Nondestructive Testing
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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