|ITEM METADATA RECORD
|Title: ||Stress induced defect generation implications of doping HfO2 with Al|
|Authors: ||O'Connor, Robert|
|Issue Date: ||2013 |
|Series Title: ||Microelectronic Engineering vol:109 pages:54-56|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
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