Title: Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams
Authors: Uedono, Akira
Verdonck, Patrick
Delabie, Annelies
Swerts, Johan
Witters, Thomas
Conard, Thierry
Baklanov, Mikhaïl
Van Elshocht, Sven
Oshima, Nagayasu
Suzuki, Ryoichi
Issue Date: 2013
Publisher: Publication Board, Japanese Journal of Applied Physics
Series Title: Japanese Journal of Applied Physics 1, Regular Papers, Short Notes & Review Papers vol:52 issue:10 pages:106501
ISSN: 0021-4922
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science