|ITEM METADATA RECORD
|Title: ||A study of nanoparticle removal on patterned surfaces|
|Authors: ||Pacco, Antoine|
De Gendt, Stefan
|Issue Date: ||2013 |
|Host Document: ||Semiconductor Cleaning Science and Technology 13 pages:17-23|
|Conference: ||Semiconductor Cleaning Science and Technology 13 location:San Francisco, CA USA date:27/10/2013|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Non-KU Leuven Association publications|
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