Title: A study of nanoparticle removal on patterned surfaces
Authors: Pacco, Antoine
Holsteyns, Frank
De Gendt, Stefan
Issue Date: 2013
Host Document: Semiconductor Cleaning Science and Technology 13 pages:17-23
Conference: Semiconductor Cleaning Science and Technology 13 location:San Francisco, CA USA date:27/10/2013
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications

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